A zero-order semiempirical model has been developed for chemically enhanced physical vapor deposition CEPVD , a recently developed hybrid approach to film deposition offering the step coverage of chemical vapor deposition while maintaining film quality similar to films produced by ionized physical vapor deposition IPVD . CEPVD is done by introducing a chemical precursor to the substrate during ...

Diamond exhibits a unique range of properties including extreme hardness, mechanical strength, high thermal conductivity, broad-spectrum optical transparency, electrical insulating properties, and chemical resistance. However, its high cost and problems in manipulation have hitherto made it difficult to realize this potential. This situation has dramatically changed with the advent of technique...

Submitted for the DFD10 Meeting of The American Physical Society Vapor stabilizing surfaces for superhydrophobicity1 NEELESH PATANKAR, Northwestern University — The success of rough substrates designed for superhydrophobicity relies crucially on the presence of air pockets in the roughness grooves. This air is supplied by the surrounding environment. However, if the rough substrates are used in...

Lines of TiSi, were written on Si(100) substrates by using a focused Ar+-laser. The reaction gas mixture consisted of TiCl, and H, and the substrate was used a s the silicon source. The laser deposited TiSi, lines were examined as a function of the deposition parameters. Especially the initial reactions have been studied b varying the the writing speed in a wide range. The C-54 phase of TiSi, w...

The subarctic North Pacific is one of three major high nitrate, low chlorophyll (HNLC) oceanic regions, along with the Southern Ocean and the eastern equatorial Pacific. In these regions, uptake of nitrogen by phytoplankton is widely thought to be regulated by the availability of dissolved iron. The supply of dissolved iron is twofold: via atmospheric deposition of dust and via upward transport...

The chemical species in gas phase and on the surface of aluminum precursor (boro-hydride trimethylamine (ABHTMA)) for aluminum deposition process with the vacuum level and the hot wall temperature were studied using two kinds of Fourier transform infrared (FT-IR) spectroscopes which was installed at the end of the chamber. The absorbance of Al-H, B-H, C-H and C-N stretching features of the chem...

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