This article describes results obtained using various plasma and surface diagnostics in a study of inductively coupled fluorocarbon plasmas in which the amount of capacitive coupling was systematically varied. It is found that the plasma density decreases while the electron temperature increases as the amount of capacitive coupling is increased at a constant source power level. The rate at whic...

A capacitive tactile sensor and a thermal sensor that can be combined into one compact device with both modalities are illustrated. The tactile sensing portion is composed of an 8 8 array of capacitive cells. By using as thermoresistors the rows’ traces of the matrix of the capacitive tactile array sensor thermal sensing is obtained. This allows the detection of the gradient of the temperature....

For the advent of pervasive bio-potential monitoring, it will be necessary to utilize a combination of cheap, quick to apply, low-noise electrodes and compact electronics with wireless technologies. Once available, all electrical activity resulting from the processes of the human body could be actively and constantly monitored without the need for cumbersome application and maintenance. This co...

As the core component of the sense of touch, flexible pressure sensors are critical to synchronized interactions with the surrounding environment. Here, we introduce a new type of flexible capacitive pressure sensor based on a template of electrodes, with a one-dimensional pyramid micropatterned structure on a Polydimethylsiloxane (PDMS) substrate and a dielectric layer of polystyrene (PS) micr...

RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...

Measurement errors of a capacitive voltage transformer (CVT) are relevant to its equivalent parameters for which its capacitive divider contributes the most. In daily operation, dielectric aging, moisture, dielectric breakdown, etc., it will exert mixing effects on a capacitive divider’s insulation characteristics, leading to fluctuation in equivalent parameters which result in the measurement ...

Capacitive sensing buttons are emerging as a popular interface alternative to mechanical switches in many consumer electronics and white goods applications. However, designing a capacitive sensing interface comes with its own challenges that introduce new product development, production, and quality control concerns. For example, the parasitic capacitance (CP) of capacitive sensing buttons can ...

This work is motivated by a hospital ward rounds scenario in the EU sponsored WearIT@Work Project. Based on a detailed application design and evaluation described in our previous work we have implemented a simple, wearable user interface seamlessly integrated in the doctor’s coat. The interface is based on a multi-electrodes, conductive textile capacitive sensor that allows the doctor to contro...