Zero-level packaging technology ensures dicing and handling compatibility of the MEMS device along with low cost by encapsulating the MEMS components using wafer level processing. It is also essential for providing the MEMS with a controlled ambient in a cost-effective way. In order to be compatible with a broad range of MEMS processes, IMEC developed sealing methods with a low temperature budg...

micro-electro-mechanical systems (mems) are combination of electrical and mechanical components in micron dimensions. in recent years, holding, actuating methods and handling of mems components such asmicrogripper, microsensors and etc. have been deeply studied. microgrippers for handling, positioning andassembling of micro components are very useful so that for clamping need actuation created ...

We discuss the co-design of integrated MEMS accelerometer array designed and fabricated onto the input of a CMOS charge amplifier. The focus of this paper is on two parts of the design flow: Firstly, advanced 3D process emulation and secondly, circuit simulation. We use a "voxel" (volumetric pixel) based process emulation tool that takes 2D masks and a description of the fabrication process, to...

− Accurate measurements of MEMS surfaces, geometries and motions are crucial to achieving the desired performance of the devices. The wide variety of MEMS devices in development and production requires very flexible metrology for single-platform characterization. In addition to having greatly varying geometries, devices must also be characterized statically and under actuation. White-light inte...

This research aims at enhancing the accuracy of land vehicular navigation systems by integrating GPS and Micro-Electro-Mechanical-System (MEMS) based inertial measurement units (IMU). This comprises improving the MEMS-based inertial output signals as well as investigating the limitations of a conventional Kalman Filtering (KF) solution for MEMS-IMU/GPS integration. These limitations are due to ...

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in ...

Commercial CAD tools for MEMS have significantly contributed to the growth that the MEMS industry has experienced over the past two years by reducing development cycles and enabling the more rapid release of mature MEMS products. Unfortunately, the CAD for MEMS industry has focused primarily on device performance (for example, mechanical response due to electrostatic loading), with a concentrat...