In this paper, four reconfigurable antennas are presented for multi-mode multi-band (MMMB) communication systems. Each antenna is able to reconfigure diverse operational frequency bands or beam directions depending on the states of embedded switches, which are implemented using pin diodes or RF-microelectro-mechanical system (RF-MEMS) switches.

This work presents a micromachined RF-CMOS transformer fabricated in a commercially available 0.18μm CMOS process. Maskless micromachining post-processing is used to remove oxide and substrate material from around the transformer, reducing parasitic effects and improving the performance of the transformer. Index Terms — baluns, CMOS integrated circuits; MEMS, maskless micromachining, Q enhancem...

Abstract—The present paper describes an integrated approach for design, fabrication and encapsulation of RF MEMS switches in view of the optimal performance subsequent to packaging. ‘Top and bottom contact’ fabrication approaches are explored using different RF MEMS switch topologies. In the ‘bottom contact package (BCP)’ the packaging cap alignment is less critical as compared to the top conta...

This paper introduces our recent activities in R&D Center of Excellence for Integrated Microsystems toward new integrated MEMS. The most prominent difference of the new integrated MEMS from conventional ones is that MEMS is fabricated on advanced LSI with a very small design rule. Two examples of integrated MEMS technologies under development are described. The first one is singlecrystal-silico...

Charge accumulation in dielectrics solicited by an applied voltage, and the associated temperature and time dependencies are well known in scientific literature since a number of years [1]. The potential utilization of materials being part of a device useful for space applications is a serious issue because of the harsh environmental conditions and the necessity of long term predictions about a...

Starting in the early 1960’s, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From t...

This paper discusses issues relating to the reliability and methods for employing high-cycle life testing in capacitive RF MEMS switches. In order to investigate dielectric charging, transient current spectroscopy is used to characterize and model the ingress and egress of charges within the switch insulating layer providing an efficient, powerful tool to investigate various insulating material...

MicroElectroMechanical Systems for Radio Frequency applications (i.e. RF-MEMS) show very good performance and characteristics. However, their employment within large-scale commercial applications is still limited by issues related to the reliability of such components. In this work we present the Finite Element Method (FEM) modelling and preliminary experimental results concerning an active res...

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size, large frequency-quality factor product, low power consumption, low cost batch fabrication, and integrability with CMOS IC technology. Radio frequency communi...