We report a simple and efficient silicon wet etchant HNA (Hydrofluoric acid, Nitric Acetic acid) for the stiction free release of nitride/metal micro/nanomechanical structures. The concentration was varied with aim developing slow etch rate, which could be utilized to suspend micron sub-micron cantilever fixed beam rate found decrease in HF increase HNO3 concentrations. Smooth surface high sele...

In the current study, we explore sensitivity of actuation dynamics electromechanical systems on novel materials, e.g., Bi2Se3, which is a well-known 3D Topological Insulator (TI), and compare their response to metallic conductors, Au, that are currently used in devices. Bifurcation phase portraits analysis conservative suggest strong difference between conduction states Bi2Se3 Au yields suffici...

Mechanical failure of an ideal crystal is dictated either by an elastic instability or a soft-mode instability. Previous interpretations of nanoindentation experiments on suspended graphene sheets,1,2 however, indicate an anomaly: the inferred strain in the graphene sheet directly beneath the diamond indenter at the measured failure load is anomalously large compared to the fracture strains pre...

This paper describes a new class of anti-stiction coatings for silicon MEMS that is based on the free radical reaction of a primary alkene (e.g., 1-octadecene, C16H33CH=CH2) with hydrogen terminated silicon [1,2]. The new monolayer coating has several key advantages over the previously reported octadecyltrichlorosilane (OTS) and 1H,1H,2H,2Hperfluorodecyltrichlorosilane (FDTS) based self-assembl...

Abstract In developing micro- and nanodevices, stiction between their parts, that is, static friction preventing surfaces in contact from moving, is a well-known problem. It caused by the finite-temperature analogue of quantum electrodynamical Casimir–Lifshitz forces, which are normally attractive. Repulsive forces have been realized experimentally, but reliance on specialized materials severel...