A novel spectral imaging ellipsometer based on a mono-axial power spectrograph has been developed for one-dimensional spectroscopic measurement of patterned structures. To obtain the imaging data of a patterned sample using ellipsometry can be realized by conventional ellipsometers with 2-dimesional (2D) scanning sample stage or 2D imaging ellipsometers with imaging optics. The former has major...

In this article we describe a new slit grating spectrograph which is based on an e-beam written 10 000 linepairs/mm freestanding transmission diffraction grating. In combination with a thinned, back-illuminated charge coupled device ~CCD!, the spectrograph allows for real-time spectroscopy of laser-produced plasma x-ray sources within the wavelength region l51–20 nm. Calibration of grating and ...

The photoelectric exposure meter described in this thesis was designed to monitor a small, fraction of the light passing through an astronomical spectrograph, and to provide a continuous indication of the integral value of the light flux being monitored as measured from some reference time determined by the operator. Since the sample com­ prises a fixed, percentage of the total flux passing thr...