By interfering two small diameter Gaussian laser beams, scanning beam interference lithography ~SBIL! is capable of patterning linear gratings and grids in resist while controlling their spatial phase distortions to the nanometer level. Our tool has a patterning area that is up to 300 mm in diameter. The motive for developing SBIL is to provide the semiconductor industry with a set of absolute ...

"Natural" lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The "nanocapacitors" possessed a capacitance of approximately 1 x 10(-16) F and were observed to hold charge for over an hour. Our results indicate that fab...

Scanning probe based patterning techniques have the unique ability to deposit biological material into specific architectures on substrates and read and analyze the patterns using an atomic force microscope. Such devices are able to make much smaller biomolecule patterns, on the order of nanometers, than conventional techniques such as microcontact printing and optical lithography. A reduction ...

The immobilization of brain dopamine receptors (primary targets in the treatment of schizophrenia, Parkinson’s disease, and Huntington’s chorea) on a solid support can represent an appealing strategy for the realization of biosensors for dopamine and dopaminergic drugs. Our final goal is the realization of an optical biosensor that allows parallel quantitative analysis, with different receptors...