In this study, PbZr0.52Ti0.48O3/BaTiO3 (PZT/BTO) multilayers with varying layer fractions were deposited on Pt/Ti/SiO2/Si substrates by sol–gel process. The films characterized X-ray diffraction and scanning electron microscopy (SEM). result shows that there exists a dielectric enhancement when the BTO fraction x is around 0.5, at fraction, constant of PZT/BTO 590 100 kHz, which far more than m...

In this paper we report a novel capillary-force-driven selfassembly technique which proceeds in an air environment. We demonstrate this technique for the self-assembly of piezoelectric driving elements (PZT) for diffuser valve micropumps: with the agitation of an orbital shaker, square PZT actuators self-align and mount to the hydrophilic trench binding sites with electric connections by heat c...

We deposited a lead zirconate titanete (PZT) polycrystalline film on a titanium substrate by the hydrothermal method and fabricated a transducer using the PZT film for use as an ultrasound probe. A 10MHz miniature one-dimensional-array medical ultrasound probe containing the PZT film was developed. After sputtering titanium on the surface of a hydroxyapatite substrate, the titanium film on the ...

We have deposited nearly stress-free single-crystal thin films of 001 Pb Mn,Nb O3–Pb Zr,Ti O3 PMnN-PZT on 001 MgO substrates by rf-magnetron sputtering using a quenching process after the film growth. It is found that single c-domain/single-crystal thin films of PMnN-PZT containing 5%–10% PMnN show a strong hard ferroelectric response with 2Ec 400 kV /cm and Ps 70 C /cm2. GHz-range film bulk ac...

We investigate coherent phonon propagation in a thin film of ferroelectric PbZr(0.2)Ti(0.8)O(3) (PZT) by ultrafast x-ray diffraction experiments, which are analyzed as time-resolved reciprocal space mapping in order to observe the in- and out-of-plane structural dynamics, simultaneously. The mosaic structure of the PZT leads to a coupling of the excited out-of-plane expansion to in-plane lattic...

The Metal-Ferroelectric-Semiconductor FET (MFSFET) device is structurally similar to a regular MOSFET device except that the gate material is composed of a ferroelectric material (PZT) normally sandwiched between two layers of silicon dioxide. Ferro models the PZT material with a set of four material parameters; the saturation polarization Ps, the remanent polarization Pr, the coercive field Ec...

We discuss the concept of lightweight segmented bimorph mirrors for adaptive optics. The segment consists of a monocrystal silicon substrate actuated by an array of in-plane piezoceramic (PZT) actuators with honeycomb electrodes. We focus on technological aspects of the segment design that are critical for space applications and describe a single segment demonstrator. The morphing capability of...

ABSTRACT This paper proposes a new valveless pump using a PZT diaphragm to create a gas jet flow for fluidic applications. The pump was designed and simulated based on transient fluidic analysis with experimental result of PZT diaphragm so that the features of micropump are reliably predicted. The experimental results of a PMMA prototype confirmed the performance of the pump. The fabrication pr...

The stacked PZT actuators are widely used in precision equipments. In this paper, a new type of mechanical magnifier incorporated with stacked PZT, which we brand it as MechaTrans is proposed. It is a two-step magnification mechanism and is capable of performing precise and high speed linear motion. 30 types of MechaTrans are commercialised. We have confirmed that the stroke is magnified up to ...