The miniaturization of robots with locomotion abilities is a challenge significant technological impact in many applications where large-scale have physical or cost restrictions. Access to hostile environments, improving microfabrication processes, advanced instrumentation are examples their potential use. Here, we propose miniature 20 mm long sub-gram robot piezoelectric actuation whose direct...

Concept and Key Idea Photonic-bandgap microcavities in optical waveguides have demonstrated cavity resonances at wavelengths near 1.55 μm band, quality factors on the order of 300, and modal volume at 0.055 μm3 in high-index contrast Si/SiO2 waveguides and GaAs air-bridge waveguides. Applications include zero-threshold microlasers, filters and signal routers. For tunability in Si microphotonic ...

This paper describes a multivariable controller design procedure that uses mixed-sensitivity H-infinity control theory. The design procedure is based on the assumption that structural noise can be modeled as entering a state-space system through a random input matrix. The design process starts with a full-order flexible state-space model that undergoes a frequency-weighted balanced truncation t...

This article presents a finite element reduced order model for the nonlinear vibrations of piezoelectric layered beams with application to NEMS. In this model, the geometrical nonlinearities are taken into account through a von Kármán nonlinear strain–displacement relationship. The originality of the finite element electromechanical formulation is that the system electrical state is fully descr...

We have designed and fabricated tunable gratings with period tunable to within fraction of a micrometer. We actuated the gratings by electrostatic and piezoelectric means, and demonstrated period changes of order 1nm. Introduction Optical MEMS devices have included micro-mirrors [1, 2], tunable gratings, tunable Fabry-Perot resonators, etc. For example, Silicon Light Machines has commercialized...

This article describes the challenges of integrating smart sensing, actuation, and control concepts into an over-sensed over-actuated technology integrator. integrator has more inputs than expected responses or outputs (over-actuated), its every state is measured using one sensor system (over-sensed). The hardware integration platform chosen to be a wind tunnel model low-speed aircraft wing suc...

Piezoelectric-based nano resonators are smart structures that can be used for mechanical sensors and actuators in miniature systems. In this study, the nonlinear vibration behavior of a curved piezoelectric-layered nanotube resonator was investigated. The structure comprises core slender layer piezoelectric material covering inner where harmonic voltage is applied to layer. Applying energy meth...

Microsensors and microactuators are considered to be the most crucial elements of micro-electromechanical systems (MEMS) and devices. There has been growing interest in the development of new microactuator technologies with an increasing requirement for low cost microswitch arrays providing large air gap and large force at the same time. In particular, large air gap/large force microactuators a...