The water content of phosphoric acid in etching silicon nitride and silicon dioxide plays an important role. An increase in water content increases the etch rate of silicon nitride and decreases the etch rate of silicon dioxide. The highest possible temperature for a fixed water content at atmospheric pressure in the system H2O-P2O5 is realized by boiling the liquid and refluxing the vapor phas...

Devices made from graphene encapsulated in hexagonal boron-nitride exhibit pronounced negative bend resistance and an anomalous Hall effect, which are a direct consequence of room-temperature ballistic transport at a micrometer scale for a wide range of carrier concentrations. The encapsulation makes graphene practically insusceptible to the ambient atmosphere and, simultaneously, allows the us...

We have built and characterized batch-processed polarization beam splitters (PBS), important optical components to separate the orthogonal TE and TM components of light. The devices were fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes, and a triple-layer PBS produced extinction ratios of 21 and 16dB for reflected and transm...

This paper presents results of a systematic investigation to characterize the sealing of micromachined cavities using chemical vapor deposition (CVD) methods. We have designed and fabricated a large number and variety of surface-micromachined test structures with different etch-channel dimensions. Each cavity is then subjected to a number of sequential CVD deposition steps with incremental thic...

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

The doping reaction of truncated boron nitride and carbon nanotubes with aluminium atom wastheoretically investigated. The AM1, PM3, and PM6 semiempirical methods have been used toevaluate the thermochemistry of doping reactions of single walled boron nitride nanotubes andcarbon nanotubes. The enthalpy changes, Gibbs free energy changes, and entropy changes of studieddoping reactions were evalu...

in the present research, nonlinear vibration in a coupled system of boron-nitride nano-tube reinforced composite (bnntrc) oil pipes is studied. single-walled boron-nitride nano-tubes (swbnnts) are arranged in a longitudinal direction inside poly-vinylidene fluoride (pvdf) matrix. damping and shearing effects of surrounded medium are taken into account by visco-pasternak model. based on piezoele...

This research work presents the results of an experimental investigation of cryogenically treated, coated and uncoated tungsten carbide cutting tool inserts in turning of AISI 1040 steel. Three different tungsten carbide inserts coated with aluminum chromium nitride (AlCrN), titanium nitride (TiN) and uncoated WC were taken and treated cryogenically. Experiments were performed to evaluate the c...

III-nitride alloys are the key materials for the future high-power, efficient, and reliable photovoltaic systems. Their large band-gap tunability covers wavelengths ranging from infrared (~0.7eV/InN) up to ultraviolet (6.2eV/AlN), making them ideal candidates for a broad range of optoelectronics applications. Rapid progress during the last decade in nanostructure processing allowed significant ...