Periodic behavior analysis of nano/microelectromechanical systems (N/MEMS) is an essential field owing to their many promising applications in microinstruments. The interesting and unique properties these systems, particularly, small size, batch fabrication, low power consumption, high reliability, have fascinated researchers industries implement structures for the production different microdev...

INTRODUCTION Over the past decade micromachinining technology has shown rapid development enabling manufacture of complex microelectromechanical systems (MEMS). Microscale pumps, turbines, thrusters, sensors and actuators are a few examples of these small-scale devices. The reduction in scale increases the complexity of these systems. Physical laws governing these devices vary greatly from macr...

INTRODUCTION Microelectromechanical Systems (MEMS) are among the most significant technological advances of this decade. The objective of this technology is to manufacture " systems " whose dimensions are only a few hundred microns. Devices with applications ranging from drug delivery systems to telecommunications are currently under development. Their reduced size and weight give them unique a...

In recent years, there has been a desire to scale down linear quadrupoles. The key advantages of this miniaturization are the portability it enables and the reduction of pump-power needed due to the relaxation on operational pressure. Various attempts at making MEMS-based linear quadrupoles have met with varying degrees of success [1]-[3]. Producing these devices involved some combination of pr...

Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, la...

In this paper, we outline the process leading from technologies to successful products in the MEMS (Microelectromechanical Systems) and MST (Microsystems Technology) field. The development of new products involves a lot of factors, such as mature technologies, interdisciplinary team, identifying the right business potential and long term oriented investors. The paper summarizes a survey of diff...

In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (...