This paper describes design, fabrication, and characterization of microhotplates based on microcantilevers. Six different hotplate cantilever esigns are proposed to investigate heating response time and temperature uniformity. Devices were fabricated and their electrical, thermal, and echanical characteristics were measured. The cantilevers have electrical resistance in the 1 k range, consume 1...

Biosensors based on microcantilevers have become a promising tool for directly detecting biomolecular interactions with great accuracy. Microcantilevers translate molecular recognition of biomolecules into nanomechanical motion that is commonly coupled to an optical or piezoresistive read-out detector system. Biosensors based on cantilevers are a good example of how nanotechnology and biotechno...

The mechanical properties of ultrananocrystalline diamond (UNCD) thin films were measured using microcantilever deflection and membrane deflection techniques. Bending tests on several free-standing UNCD cantilevers, 0.5 μm thick, 20 μm wide and 80 μm long, yielded elastic modulus values of 916–959 GPa. The tests showed good reproducibility by repeated testing on the same cantilever and by testi...

With the vast potential of micro-electro-mechanical systems (MEMS) technology, the reliability is essential for the successful applications of microdevices. Polycrystalline silicon is one of the most often used structural materials in microdevices. Tension testing for fatigue life of this material has been investigated since past years. This paper presents a micro-actuatorbased bending testing ...

The properties of water at the nanoscale are crucial in many areas of biology, but the confinement of water molecules in sub-nanometre channels in biological systems has received relatively little attention. Advances in nanotechnology make it possible to explore the role played by water molecules in living systems, potentially leading to the development of ultrasensitive biosensors. Here we sho...

An effective optical read out approach based on fiber reflective is presented to detect bends of a biomaterial microcantilever. The microcantilever was fabricated on single crystalline SOI wafer using a series of side definitions and backside wet/dry etchings. A Cr/Au layer with 30 nm Cr and 50 nm Au layer was deposited for the immobilized of bimolecular on the cantilever surface and for reflec...

We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching ...

Glucose responsive polymer brushes were synthesized on gold substrates and microcantilever arrays. The response properties of these brushes were evaluated by exposing them to different glucose concentrations for a range of pH values. This work demonstrates the potential for polymer brush-functionalized micromechanical cantilevers as glucose detectors. Furthermore, the work demonstrates that sti...