Models are used in metrology to characterise measurement data and, where appropriate, the process which produced that data. Indeed, modelling is a procedure designed to extract information from data. Therefore, for any proposed model, the question then arises: is the information provided by the model comprehensive and reliable? This question is resolved by model validation. This report describe...

The field of software metrics is usually discussed from the perspective referred to as ‘measurement theory’. However, in other disciplines, the domain of knowledge referred to as ‘metrology’ is the foundation for the development and use of measurement instruments and measurement processes. This paper presents an initial modelling of the sets of measurement concepts documented in the ISO Interna...

Frequency combs, millions of narrow-linewidth optical modes referenced to an atomic clock, have shown remarkable potential in time/frequency metrology, atomic/molecular spectroscopy and precision LIDARs. Applications have extended to coherent nonlinear Raman spectroscopy of molecules and quantum metrology for entangled atomic qubits. Frequency combs will create novel possibilities in nano-photo...

Software metrics' are most often proposed as the measurement tools of choice in empirical studies in software engineering, and the field of 'software metrics' is most often discussed from the perspective referred to as ‘measurement theory’. However, in other disciplines, it is the domain of knowledge referred to as ‘metrology’ that is the foundation for the development and use of measurement in...

− Energy transmission by high voltage direct current – HVDC is steadily increasing in the world, both at the highest power levels, but also at medium power, for example in connections of remote wind-parks to the main a.c. grid. Although principles for d.c. side measurements are known since long, support from metrology is not on par with the needs. An overview of available technologies and the c...

Capacitive displacement sensors are widely used in precision manufacturing and metrology because they measure displacements with nanometer resolution. Prior literature usually treats capacitive sensors consisting of electrodes arranged as parallel plates. In this work, the target electrode is spherical, which is common in machine tool metrology, spindle metrology, and the measurement of spheric...

The success of using thin substrates in various fields has urged researchers to further study the possibilities of improving the technology for uture applications. For example, the high surface-area-to-weight ratio and strength of sheet glass allow flat-panel display technology to result n high-definition televisions that can be hung on walls like paintings. Sheet glass is also the prime candid...

The increasing interest towards intelligent systems has led to a demand for the development of zero-defect strategies, with a paradigm shift from off-line and dedicated to inline metrology with integrated robotic systems. However, a major barrier preventing the systematic uptake of in-line metrology is the lack of evaluation of system capability in terms of accuracy, repeatability and measureme...

In situ mass spectrometric sensing has been implemented in a 10 Torr H2 /WF6 W chemical vapor deposition process as a real-time process and wafer state metrology tool. Dynamic sensing through the process cycle reveals HF byproduct generation as well as H2 and WF6 reactant depletion as real-time quantitative indicators of deposition on the wafer. Thickness metrology is achieved by integrating th...