This paper presents a signal processing technique to improve angular rate accuracy of the gyroscope by combining the outputs of an array of MEMS gyroscope. A mathematical model for the accuracy improvement was described and a Kalman filter (KF) was designed to obtain optimal rate estimates. Especially, the rate signal was modeled by a first-order Markov process instead of a random walk to impro...

Periodic behavior analysis of nano/microelectromechanical systems (N/MEMS) is an essential field owing to their many promising applications in microinstruments. The interesting and unique properties these systems, particularly, small size, batch fabrication, low power consumption, high reliability, have fascinated researchers industries implement structures for the production different microdev...

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface...

A general decline in the cost, size, and power requirements of electronics is accelerating the adoption of integrated GPS/INS technologies in consumer applications such Land Vehicle Navigation. Researchers have looking for ways to eliminate additional components from product designs. One possibility is to drop one or more of the relatively expensive gyroscopes from microelectromechanical system...

A rocking mass gyroscope (RMG) is a kind of vibrating mass gyroscope with high sensitivity, whose driving mode and sensing mode are completely uniform. MEMS RMG devices are a research hotspot now because they have the potential to be used in space applications. Support loss is the dominant energy loss mechanism influencing their high sensitivity. An accurate analytical model of support loss for...

In this paper, we present a novel microelectromechanical system-interdigital transducer (MEMS-IDT) surface acoustic wave (SAW) gyroscope with an 80MHz central frequency on a 128 YX LiNbO3 wafer. The developed MEMS-IDT gyroscope is composed of a two-port SAW resonator, a dual delay line oscillator, and metallic dots. The SAW resonator provides a stable standing wave, and the vibrating metallic d...

Although MEMS gyroscopes are simpler to integrate into electronic systems than their mechanical predecessors, many factors still require consideration, including trade-offs among function, performance, and price. For many systems, a key performance metric is accuracy. Although off-the-shelf products may satisfy some design requirements, a gyroscope that appears to suit a system design may end u...