Over the last few years interests have emerged for application of MEMS in telecommunications. The use of MEMS for optical switching has turned to be the most attractive since this application could revolutionize fiber optic telecommunications. In this paper a robust control strategy based on sliding-mode control theory is developed for a MEMS optical switch, considering electrical, mechanical, ...

Modern Magnetic Resonance Imaging (MRI) systems permit parallel, spatial-encoded MRI (pMRI) and as such it is now possible to have up to 128 adjacent coil elements in a coil array [1]. Together with reduced imaging times, pMRI can significantly help to enhance the signal to noise ratio (SNR) over extended fields of view (FOV) [2]. However, a large number of channels subsequently create new tech...

Photonic Integrated Circuits (PICs) benefit from the technology advances in semiconductor industry to incorporate an ever-increasing number of photonic components on a single chip create large-scale integrated circuits. We here present broadband, compact and low-loss Silicon MEMS switch based Single-Pole Double-Throw (SPDT) architecture, where curved electrostatic actuators mechanically displac...

We present the design and proof-of-concept demonstration of an optical device capable of producing true-time delay(s) (TTD)(s) for phased array antennas. This TTD device uses a free-space approach consisting of a single microelectromechanical systems (MEMS) mirror array in a multiple reflection spherical mirror configuration based on the White cell. Divergence is avoided by periodic refocusing ...

Recently, the acceptance of micro electromechanical systems (MEMS) technology is growing in various areas such as medical, optical, automobile and telecommunication. In realizing the needs in MEMS, techniques derived from mechanical engineering plays an essential role in the determination of geometric design variables and process parameters, experiments in fabrication and the elastic and plasti...

Experimental measurements and modeling predictions were obtained to characterize the electro-mechanical response of two different gold contact radio frequency microelectromechanical system (RF MEMS) switches due to variations in the temperature and applied contact voltage. A three-dimensional surface roughness profile from AFM measurements of the top contact surface of a sample RF MEMS switch w...