Thermal decomposition of SiC has been used for the fabrication of high quality monolayer graphene and graphene nanoribbons on semi-insulating substrates. In this work, we propose a selective oxygen etching method to remove buffer layers on SiC surfaces that are connected to monolayer graphene formed from step edges. A thermal treatment in an extreme low partial pressure oxygen diluted by argon ...

It is proposed that the “threshold for etchable track formation” in plastics is associated with the linear density of activated polymeric clusters along the path of an ion, in the “grain-count regime.” Existing data for CR-39 reveal a change in etching rate in the neighborhood of z/β having the value of about 15-20. We infer that this defines the transition from the grain count regime to the tr...

This paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silicon wafers to fabrication V-groove for optical fiber alignment and micro-mirror were included. Combing with anodic bonding technique to adhere glass, silicon structure and optical fiber for a fluorescence excitation plat...

Half-circular channels, to be used for gas chromatography, were etched isotropically using a mixture of HF, HN09 and HzO. Two wafers with half-circular channels were bonded on top of each other to yield channels with a circular cross-section. During etching the so-called “loading effect” was encountered: the etch rate depends on the local structure density. To solve this, extra structures were ...

Cuprous oxide films (Cu2O) supported on Cu or on SiO2 were etched using solutions of h-diketones including 1,1,1,5,5,5hexafluoroacetylacetone, 2,2,6,6-tetramethyl-3,5-heptanedione and 2,2,7-trimethyl-3,5-octanedione (TMOD) in supercritical carbon dioxide at temperatures between 80 and 150 -C and pressures between 20 and 27.5 MPa. The films and etched substrates were analyzed by X-ray photoelect...

INTRODUCTION: Treatment of osteoarthritis and rheumatoid arthritis by total joint replacement generally shows a high success rate; however challenges remain, particularly in improving revision implant fixation. Prostheses with a roughened surface inserted without cement are popular worldwide, especially for younger more active patients. Early bone ongrowth is known to be critical to long-term f...

A low-destructive friction-induced nanofabrication method is proposed to produce three-dimensional nanostructures on a quartz surface. Without any template, nanofabrication can be achieved by low-destructive scanning on a target area and post-etching in a KOH solution. Various nanostructures, such as slopes, hierarchical stages and chessboard-like patterns, can be fabricated on the quartz surfa...

In micromechanics, the etching of high aspect ratio structures in polymers is a grime technology. Normally, oxygen-based reactive ion etching or the LIGA technique are used to achieve this goal. This paper reintroduces a different idea to create deep trenches at high etch speed: The ion beam etching of TeflonTM. Because of its extraordinary properties the etch selectivity with respect to most o...