نتایج جستجو برای: dc sputtering
تعداد نتایج: 62862 فیلتر نتایج به سال:
This Article is brought to you for free and open access by the Electrical & Computer Engineering at ODU Digital Commons. It has been accepted for inclusion in Electrical & Computer Engineering Faculty Publications by an authorized administrator of ODU Digital Commons. For more information, please contact [email protected]. Repository Citation Aryal, K. P.; Khatri, H.; Collins, R. W.; and M...
Ti-A-C-Ag (A is Si, Ge or Sn) nanocomposite coatings have been deposited by dc magnetron sputtering in an ultra high vacuum chamber. Electron microscopy, energydispersive x-ray spectroscopy, x-ray photoelectron spectroscopy, and x-ray diffraction show that all coatings contain nanocrystalline TiC and Ag grains in a matrix of mainly amorphous C. A C/Ti ratio above unity yields a homogenous distr...
We report the growth and properties of a-axis oriented GdBa,CusO,-a high T, thin films on (100) SrTi03 substrates by dc magnetron sputtering. It is found that GdBa,Cu,O,-s films on (100) SrTiO, exhibit a-oriented growth at higher substrate temperatures compared with YBaQtsO,-& films. By utilizing low-temperature-grown u-axis GdBazCu,O,_.s films (200 A in thickness) as a self-template, pure a-ax...
Suspended molecules of DNA are used as substrates for deposition of various metals by DC sputtering. The result is the formation of metallic nanowires, most with diameters of 10-50 nm. Homogeneous wires have been observed when a proper metal is chosen. For the first time, these DNA-templated nanowires are fabricated on substrates conducive to transmission electron microscopy. TEM and SEM analys...
Electrical properties, current transport mechanism, and stress induced leakage current (SILC) effect of Al2O3 gate dielectric thin films deposited by reactive dc magnetron sputtering were studied. The results show that annealing in O2 ambient can effectively reduce the oxygen vacancy in Al2O3 films but may not result in additional interfacial layer form at Al2O3/Si interface. In the fresh devic...
Fe-Pd alloy films, prepared by using a DC magnetron sputtering method, were developed as a high sensitive actuator, which was driven by the magnetic field. Fe-Pd alloy film shows large magnetostriction and high magnetostrictive susceptibility under 1 kOe. To evaluate the moving potential as magneto-driving actuator, the magnetostrictive properties were measured under different tensile loading s...
In2O3-x thin films with a thickness of 100-990 nm were grown by dc magnetron sputtering. Their structural, electrical and ozone sensing properties were analyzed. Structural investigations carried out by electron probe micro analysis, secondary ion mass spectrometry and atomic force microscopy showed a strong correlation between stoichiometry, surface topology and gas sensitivity. Moreover, the ...
We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150 nm to 3 nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C SSPDs were fabricated on high quality NbN films of different thickness (7 to 3 nm) deposited under o...
Optical and magneto-optical properties of amorphous Gd22Fe78 (GdFe) thin films prepared by direct current (DC) sputtering on thermally oxidized substrates were characterized by the combination of spectroscopic ellipsometry and magneto-optical spectroscopy in the photon energy range from 1.5 to 5.5 eV. Thin SiNx and Ru coatings were used to prevent the GdFe surface oxidation and contamination. U...
Study of Aluminum nitride (AlN) thin film deposited on silicon wafer and glass substrates by DC magnetron sputtering technique at different power variation. The X-ray diffraction and Fourier transform infrared spectroscopy (FTIR) study revealed the formation of the AlN phase. The optical characteristics of films, such as refractiveindex, extinction coefficient, and average thickness, were calcu...
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