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The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating ...

In this paper we present a cost effective method to fabricate flexible, high density piezoelectric tape, and expl'ore its potential application as a new type of Lamb wave phased array for Structural Health Monitoring (SHM) through simulating the Lamb wave propagation generated from single element and multielement arrays. The piezoelectric tape consists of many patterned and densely packed PZT (...

We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer layer on the fused silica substrate, are highly transparent (>60% in the visible optical range). Fully crystallized Pb(Zr0.52Ti0.48)O3 (PZT) films...

Synthesis by the hydrothermal method has various advantages, including low reaction temperature, three-dimensional substrate availability, and automatic polarization alignment during the process. In this review, powder synthesis, the fabrication of piezoelectric thin films, and their applications are introduced. A polycrystalline lead zirconate titanate (PZT) thin film was applied to a micro ul...

Sol-gel derived lead zirconate titanate (PZT) thin films are being investigated for micromechanical applications. A synthesis technique which involves the spin coating of several thin layers followed by rapid thermal annealing to crystallize the perovskite phase and repetition to achieve thicker films is described. Methods of improving the PZT-PZT interfaces between subsequently annealed layers...

Epitaxial lead zirconate titanate nanoislands were obtained by a self-patterning method using the instability of ultrathin films during high-temperature treatments. After high-temperature annealing, the as-deposited film breaks into islands with a narrow size distribution. Nanostructures, as small as 20 nm lateral size with a height of 9 nm, were epitaxially grown on Nb-doped (001) SrTiO3 subst...

This letter reports on the performances of a frequency-tunable lead-zirconate-titanate-transduced fully differential mechanically coupled high-overtone width-extensional filter. The demonstrated electric field tuning provides channel agility and bandwidth adjustability for the incorporation of analog spectral processors in modern radio receiver architectures. We designed and experimentally char...