In order to better understand the role of the uid behavior in CMP, we measured slurry transport beneath a glass wafer. We quanti ed the slurry transport using Residence Time Distribution techniques and two measures of slurry transport e ciency de ned as the percentage of new slurry beneath a wafer. Slurry transport e ciency depended on platen speed, ow rate, and the conditioning method. We foun...

It may be true that some commercially available blast cleaning abrasives will reveal the presence of soluble chlorides or sulfate salts. Such abrasive contamination may originate from various sources. One potential source could be the raw material process water containing chloride or sulfate salts in solution. Contamination may also occur during the transportation of the abrasive along the seac...

Abrasive machining in general and grinding in particular are processes, which increase their importance with high demands on accuracy of surface finish. The chip thickness is an evaluating variable to describe the quality of ground surface as well as the performance of the overall grinding system. A significant characteristic that distinguishes ceramics from metals is their low fracture toughne...

Metal abrasive particle content in lubricating oil is an important index to judge the degree of deterioration of lubricating oil. Established a spiral electrode capacitance sensor by the finite element software ANSYS, the simulation result shows that the sensor is sensitive to the content of metal abrasive particle in lubricating oil, not affect by the metal abrasive particle itself. According ...

Abrasive machining is a widely employed finishing process for different materials such as metals, ceramics, glass, rocks, etc to achieve close tolerances and good dimensional accuracy and surface integrity. High efficiency abrasive machining is one of the important techniques of advanced manufacture. Combined with raw and finishing machining, it can attain high material removal rate like turnin...

The distribution of moisture, degradable C, and N after direct injection of slurry can affect the turnover and plant availability of slurry N. This study examined effects of injection method, soil conditions, and slurry properties on the infiltration of several slurry components under practical conditions. The water retention capacity of 22 pig and cattle slurries was quantified by dialysis at ...

Silicon carbide (SiC) is widely used as a power semiconductor substrate material, even if it takes large amount of processing time to secure an appropriate surface wafer for devices after chemical mechanical polishing (CMP). Therefore, studies on SiC CMP have focused shortening the by increasing material removal efficiency. Among methods that been studied recently, photocatalysis-assisted (PCMP...

Stainlesssteel 403 is high-alloysteelwith good corrosion resistance and it’svery hard material. Abrasive water jet is an effective method for machining, cutting and drilling of stainlesssteel 403. In thispaperweoptimize the metalremoval rate of stainlesssteel 403 in abrasive water jet machining. The MRRisoptimize by usingthreeparameters water pressure, abrasive flow rate and stand-off distance ...

This research was conducted to develop flowable slurry containing fibrous residuals from pulp and paper mills. Two types of flowable slurry containing ASTM Class C fly ash were produced: fly ash slurry and sandy slurry. Often, the fly ash slurry made without fibrous residuals showed a tendency to set rapidly, and become unworkable. When the cement-to-fly ash ratio was increased to extend the ti...

In this paper, a finishing system with a mounted abrasive tool is proposed for finishing of metallic molds. The shape of the mounted abrasive tool is a ball-end type. When a metallic mold with curved surface is polished, the orientation of the mounted abrasive tool is not only fixed but also its revolution is locked. The motion of the mounted abrasive tool is feedforwardly controlled based on a...