In this paper, we present an automated method for selecting optimal overlay sampling plans based on a systematic evaluation of the spatial variation components of overlay errors, overlay prediction errors, sampling confidence, and yield loss due to inadequate sampling. Generalized nested ANOVA and clustering analysis are used to quantify the major components of overlay variations in terms of st...

When the distribution of lifetimes is 2-parameter exponential, Balasooriya [6] provided a failure-censored reliability sampling-plan to save test time. This paper extends the Balasooriya sampling plan to the Weibull distribution and provides a limited failure-censored reliability sampling plan (LFCR) to do life testing when test facilities are scarce. The -expected test time of the LFCR is comp...