This paper reports a novel methodology and its application to the modeling of a complex 3D geometry on wafer from a layout data. Our modeling method comprises the steps of: drawing a mask layout; transforming the mask layout into a 3D structure by simulating the physical semiconductor process; and extracting device parameters by numerical technique. In order to estimate a 3D structure from the ...

One generic technique for model idealisation is dimensional reduction. In dimensional reduction, the finite element model makes use of elements of reduced dimension, such as beams, plates and shells. This project describes some operations that have been defined and implemented which allow the user to reduce the dimensionality of geometric models automatically using a novel decomposition and red...