The following work reports the design, numerical, analytical and simulation characterization of an Aluminum Nitride MEMS resonator. The paper offers a comparison of rectangular plate MEMS resonator (length extensional and width extensional mode shapes) and ring shape MEMS resonator. It also demonstrates the contour Eigen modes of resonators and their equivalent electric circuit model (BVD). Fur...

This paper presents a review of radio frequency microelectromechanical systems (RF MEMS) research within Europe. A tour of Europe is given, identifying the key institutions within France, Germany, Belgium, Switzerland, Sweden and the UK. Some of the activities from these institutions have been mentioned, with corresponding references cited. The European Union’s Network of Excellence in RF MEMS ...

This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membranesupported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and co...

There is strong experimental evidence for the existence of strange modes of failure of MEMS devices under shock. Such failures have not been explained with conventional models of MEMS. These failures are characterized by overlaps between moving microstructures and stationary electrodes, which cause electrical shorts. This work presents a model and simulation of MEMS devices under the combinatio...

Microelectromechanical systems (MEMS) have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such applications, it is critical to understand underlying architectures involving choices in actuati...

As more MEMS-based products and applications move from research to commercialization, there is a growing array of choices for design and analysis software tools. Increasingly, mainstream CAD and CAE tools can be relied on to deliver robust capabilities previously available only with specialized, often expensive, MEMS-focused tools. Given the technical and business advantages of mainstream tools...

An alternative to a classical wavelength interferometer (an array of hand-assembled etalons consisting of two semitransparent mirrors separated by a fixed-cavity) is the implementation of wide band tunable filter using Micro-ElectroMechanical Systems (MEMS) technology. This approach will allow a single tunable device to replace an array of fixed-cavity filters reducing cost and parts. MEMS tech...

The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desire...

MEMS (Micro Electro Mechanical System) gyroscopes have been widely applied to various fields, but MEMS gyroscope random drift has nonlinear and non-stationary characteristics. It has attracted much attention to model and compensate the random drift because it can improve the precision of inertial devices. This paper has proposed to use wavelet filtering to reduce noise in the original data of M...

Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of a more effec...