This paper focuses on the benefits of using computer vision to control a Gough-Stewart parallel robot. Namely, it is recalled that observing the legs of such a mechanism with a calibrated camera, thus following the redundant metrology paradigm, simplifies the control law. Then, we prove in this paper that such a control law depends on a reduced set of kinematic parameters (only those attached t...

The goal of developing automated off-line vision metrology systems has largely been accomplished over recent years. The emphasis of research into measurement automation has thus moved on to implementation of more flexible and robust algorithms and processes in order to both improve performance and better accommodate data errors. This paper describes key features of the automatic measurement ope...

Surface texture and its measurement are becoming the most critical factors and important functionality indicators in the performance of high precision and nanoscale devices and components. Surface metrology as a discipline is currently undergoing a huge paradigm shift: from profile to areal characterization, from stochastic to structured surfaces, and from simple geometries to complex free-form...

Some topics never fade away but also advance. Software metrology seems to be one of those. Let’s revisit it here.

This article investigates how to adaptively predict the time-varying metrology delay that could realistically occur in the semiconductor manufacturing practice. Metrology delays pose a great challenge for the existing run-to-run (R2R) controllers, driving the process output significantly away from target if not adequately predicted. First, the expected asymptotic double exponentially weighted m...

In industrial photogrammetric measurement with CCD cameras, the number of target images may amount to several hundred when large and complex objects are involved. It is therefore impractical to use solely manual means to identify these image points. This paper reports on a further design for coded targets, which can be automatically located and identified, and it also discusses special arrangem...

C. Jassadajin , C. Kurupakorn , N. Khumthukthit , A. Pruksanubal *4 # Electrical Metrology Department, National Institute of Metrology (Thailand) 3/4-5 Moo 3, Klong 5, Klong Luang, Pathumthani 12120 THAILAND 1 [email protected] 2 [email protected] 3 [email protected] * Department of Electrical Engineering, King Mongkut’s University of Technology North Bangkok 1518 Phiboonsongkram Road, ...