Transfer printing integration of planar membrane devices on photonic and electronic circuits is becoming a well established technology. Typical systems incorporate single layer printed into full contact with the host substrate. In this work we present an advanced transfer print system that enables optical in non-planar geometries allows in-situ monitoring devices. We show micro-resonators air-c...

A brief description of the stability problem in micro and nano electromechanical devices (MEMS/NEMS) actuated by Casimir forces is given. To enhance the stability, we propose the use of curved surfaces and recalculate the stability conditions by means of the proximity force approximation. The use of curved surfaces changes the bifurcation point, and the radius of curvature becomes a control par...

Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive higher-order finite element method, using a code developed by the authors. The methodology i...

Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive higher-order finite element method, using a code developed by the authors. The methodology i...

We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning p...

AWract-The entropies and combinatorics of trees that branch according to fixed but finite numbers of rules are studied. Context-free grammars are used to categorize the ways in which nodes branch to yield daughter nodes, thus providing an organized setting to examine the entropies for random branching processes whose realizations are trees and whose probabilities are determined by probabilities...

The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. I dedicate this book to my grandchildren. Preface The intent of this book is to describe some recent data mining tools that have p...

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