1 Contact author e-mail: ali@soe.ucsc.edu ABSTRACT A 3D electrothermal model is used to simulate and optimize Si/SiGe superlattice heterostructure micro-coolers. The model considers thermoelectric/thermionic cooling, heat conduction and Joule heating. It also includes non-ideal effects, such as contact resistance between metal and semiconductor, substrate/heatsink thermal resistance, the side c...