In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures; the effect of hole’s cross section and plate’s extension is observed. Results obtained by F.E.M. models are compared ...

In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping results to be rarefied and, thus, not suitable to be modeled though the classical Navier-Stokes equation. The simplest way to consider fluid rarefaction is the introduction of a slight modification into its ordinary formulation, by substituting the standard fluid viscosity with an effective viscosity t...

Considering the variation in temperature of oil film squeeze dampers (SFDs) caused by squeezing, a more comprehensive analysis SFD can be obtained. Aiming to investigate viscosity thermal effect SFDs, this study established 3D CFD solution model. Based on total energy model, was performed. With mixture multi–phase flow Zwart–Gerber–Belamri (Z–G–B) cavitation and use additional mass coefficient,...