Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 squar pixels with 380 lm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. Th deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using bet particles from Ni...

Photonic crystal (PC) microcavities formed by 2D air holes on silicon-on-insulator substrates were utilized as biosensors to detect antibiotics with high specificity. The antibiotic, gentamicin, with molecular weight of only 478 g/mol, was successfully detected via its binding to corresponding antibody pre-immobilized on the sensor surface. Detection range (in concentration) was extended by com...

The tracking system of the CMS experiment, currently under construction at the Large Hadron Collider (LHC) at CERN (Geneva, Switzerland), will include a silicon pixel detector providing three spacial measurements in its final configuration for tracks produced in high energy pp collisions. In this paper we present the results of test beam measurements performed at CERN on irradiated silicon pixe...

This paper describes the development of a humanlike multi-modal soft finger and its ability to sense the texture of objects. This fingertip has two silicon rubber layers of different hardness; strain gauges and PVDF films are randomly distributed as tactile sensors. Owing to the dynamics of the silicon between sensors, the fingertip is supposed to have several sensor modalities. Preliminary exp...

This paper is about designing a silicon based piezoresistive micro pressure sensor for greater sensitivity. Using Finite Element Analysis (FEA) the role played by important design parameters like the side length and the thickness of the pressure sensing membrane in determining the sensitivity of the sensor are studied in detail for a pressure of 100 kPa. The fracture stress of silicon is adopte...

We use the 180 nm GLOBALFOUNDRIES (GF) BCDLite CMOS process for the production of a silicon photomultiplier prototype. We study the main characteristics of the developed sensor in comparison with commercial SiPMs obtained in custom technologies and other SiPMs developed with CMOS-compatible processes. We support our discussion with a transient modeling of the detection process of the silicon ph...

The purpose of this paper is to apply MEMS techniques to manufacture a gas flow sensor that consists with an airflow rate and airflow direction sensing units for detection of airflow states. This study uses a silicon wafer as a substrate which is deposited silicon nitride layers. To form the airflow rate sensing unit, a micro heater and a sensing resistor are manufactured over a membrane that r...

Heparin is a highly sulfated glycosaminoglycan that is used as an important clinical anticoagulant. Monitoring and control of the heparin level in a patient's blood during and after surgery is essential, but current clinical methods are limited to indirect and off-line assays. We have developed a silicon field-effect sensor for direct detection of heparin by its intrinsic negative charge. The s...

Sensor technology is moving towards wide-band-gap semiconductors providing high temperature capable devices. Indeed, the higher thermal conductivity of silicon carbide, (three times more than silicon), permits better heat dissipation and allows better cooling and temperature management. Though many temperature sensors have already been published, little endeavours have been invested in the stud...

Hydrothermal treatment of 3-aminopropyltrimethoxysilane (APTMS) in the presence of sodium citrate generates a suspension of highly fluorescent silicon nanocrystals that fluoresces blue under UV irradiation. The photoluminescent quantum yield of the as-prepared silicon nanocrystals was calculated to be 21.6%, with quinine sulfate as the standard reference. Only mercuric ions (Hg(2+)) can readily...