Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their che...

This article discusses the results of transmission electron microscopy (TEM)-based characterization of strontium-doped lead zirconate titanate (PSZT) thin films. The thin films were deposited by radio frequency magnetron sputtering at 300 degrees C on gold-coated silicon substrates, which used a 15 nm titanium adhesion layer between the 150 nm thick gold film and (100) silicon. The TEM analysis...

This research demonstrates that an indium tin oxide–silicon oxide–hafnium aluminum oxide‒silicon device with enhanced UV transparency ITO gate (hereafter E-IOHAOS) can greatly increase the sensing response performance of a SONOS type ultraviolet radiation total dose TD) sensor. Post annealing process is used to optimize optical transmission and electrical resistivity characterization in film. V...

The improvement of the physical properties of Indium Tin Oxide (ITO) layers is quite advantageous in photovoltaic applications. In this study the ITO film is deposited by RF sputtering onto p-type crystalline silicon (c-Si) with (100) orientation, multicrystalline silicon (mc-Si), and glass substrates coated with ZnO and annealed in vacuum furnace at 400°C. Electrical, optical, structural a...

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development o...

introduction: nowadays new radiochromic films have an essential role in radiotherapy dosimetry. properties such as high sensitivity, good reproducibility, high spatial resolution, easy readout and portability have made them attractive for dosimetry, especially in high-dose-gradient regions. material and methods: in this study, electron-beam dose distributions in homogenous and heterogeneous pha...

Silicon solar cells incorporating double-sided pyramidal texture are capable of superior light trapping over cells with front-side only texture. However, increased surface area, roughness and exposed <111> crystal planes of textured surfaces not only causes increased recombination, but also makes cells susceptible to shunting through pinholes in the dielectric at the sharp peaks and valleys of ...

PURPOSE Previous studies of optical interference from the whole thickness of the precorneal tear film showed much lower contrast than from the pre-contact lens tear film. It is hypothesized that the recorded low contrast is related to roughness of the corneal surface compared with the smooth contact lens surface. This hypothesis is tested, and characteristics of this roughness are studied. ME...

A study has been made of high-cycle fatigue in 2-μm thick structural films of ntype, polycrystalline silicon for MEMS applications. Using an “on-chip” test structure resonating at ~40 kHz, such thin-film polysilicon is shown to display “metal-like” stress-life fatigue behavior in room air environments, with failures occurring after lives in excess of 10 cycles at stresses as low as half the fra...