This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputter...

Diffraction gratings are very convenient elements for coupling out-of-plane light in planar waveguides of sub-micronic thickness. They have been investigated in dielectric [1] and highindex waveguides [2], and a platform for modeling has been created [3], but technology should still be improved for giving gratings efficient and simple as modeled. Standard methods like reactive ion etching throu...

Free-standing NiO/MnO2 core-shell nanoflake structure was deposited on flexible carbon cloth (CC) used as electrode for high-performance supercapacitor (SC). The NiO core was grown directly on CC by hydrothermal process and the following annealing treatment. MnO2 thin film was then covered on NiO structures via a self-limiting process in aqueous solution of 0.5 M KMnO4 and 0.5 M Na2SO4 with a c...

The intelligent digital 3-axis IMU system integrated with the MEMS sensing cores, the signal processing electronics, and the network interface is presented. The MEMS sensing cores are fabricated by using the SBM (Sacrificial Bulk Micromachining) process. The fabricated sensing core accomplishes the high performance, high yield and high reliability by the inherent high-aspect-ratio, footing-free...

We report a novel biochemical method based on the sacrificial hydrogen strategy to synthesize bimetallic gold (Au)-palladium (Pd) nanoparticles (NPs) with a core/shell configuration. The ability of Escherichia coli cells supplied with H(2) as electron donor to rapidly precipitate Pd(II) ions from solution is used to promote the reduction of soluble Au(III). Pre-coating cells with Pd(0) (bioPd) ...

A convenient method has been developed to thin electron beam fabricated silicon nanopillars under controlled surface manipulation by transforming the surface of the pillars to an oxide shell layer followed by the growth of sacrificial ammonium silicon fluoride coating. The results show the formation of an oxide shell and a silicon core without significantly changing the original length and shap...

Poly(methyl methacrylate) in the brush form is grown from the surface of magnetite nanoparticles by ambient temperature atom transfer radical polymerization (ATATRP) using a phosphonic acid based initiator. The surface initiator was prepared by the reaction of ethylene glycol with 2-bromoisobutyrl bromide, followed by the reaction with phosphorus oxychloride and hydrolysis. This initiator is an...