Transition-metal diboride thin films, which have high melting points, excellent hardness, and good chemical thermal conductivity, severely suffer from rapid oxidation in air. Here, we explore the influence of varying B content resulting nanostructure change on properties TiBx with x = 1.43, 2.20, 2.70. Results show that all as-deposited layers columnar structure. The column boundaries TiB2.20 T...