This paper reports on the first demonstration of an ultra-high resolution (~371 pW/Hz1/2) uncooled infrared (IR) detector based on a high frequency (136 MHz) Aluminum Nitride (AlN) piezoelectric resonant micro-plate completely released from the substrate and supported by two nanoscale Platinum (Pt) anchors. For the first time, fully metallic tethers were employed to support the freestanding vib...

The output of a piezoelectric nanogenerator based on ZnO nanowire is largely affected by the shape of nanowire. In order to obtain mechanically stable nanogenerator with high performance, the investigation of mechanical and electrical characteristics related to the nanowires and materials used in nanogenerators are of great interest and significance. This paper presents the various behavior of ...

The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...

Modal control and spatial filtering technologies for vibration and/or structural acoustics radiation mitigation may be implemented through the use of distributed modal piezoelectric transducers with properly shaped electrodes which, in order to increase the robustness and stability of the controlled structural system, turn undesirable mode’s contributions unobservable and uncontrollable over th...

Piezoelectric actuators (PEAs) have been widely used in micro- and nanopositioning applications due to their fine resolution, rapid responses, and large actuating forces. However, a major deficiency of PEAs is that their accuracy is seriously limited by hysteresis. This paper presents adaptive model predictive control technique for reducing hysteresis in PEAs based on autoregressive exogenous m...

This paper reports a bimorph piezoelectric vibration energy harvester incorporating multiple PZT layers. The advantage of a multi-layer generator is that it produces a higher power than a single-layer generator having the same total thickness. In addition, a lower voltage is required to polarize a multi-layer generator reducing the risk of breakdown during polarization. Moreover, the optimum re...