We have developed a novel porous low-k material called nano-clustering silica (NCS) which has a low dielectric constant (k = 2.25) and high mechanical strength (Young’s modulus E = 10 GPa), and established manufacturing technology for 45-nm node multilevel Cu/Full-NCS interconnects which use NCS in trench layers and via layers to reduce the resistance-capacitance (RC) delay. Our Cu/Full-NCS int...

Focused ion beam tomography has proven to be capable of imaging porous structures on a nano-scale. However, due to shine-through artefacts, common segmentation algorithms often lead to severe dislocation of individual structures in z-direction. Recently, a number of approaches have been developed, which take into account the specific nature of focused ion beam-scanning electron microscope image...

A multilayer-based fiber optic sensor enabling simultaneous measurement of humidity and temperature is proposed and demonstrated. The sensitive elements were multilayer coatings consisting of nano-porous TiO(2) and SiO(2) films, which were deposited on fiber end-face to form a Fabry-Perot (F-P) filter structure. Relative-humidity (RH) sensing is correlated with the shift of interference fringe ...

Wetting of the pore walls of porous templates is a simple and convenient method to prepare nanotubes. Ferroelectric lead zirconate titanate and barium titanate nanotubes were fabricated by wetting of porous silicon templates of polymeric precursors. The ferroand piezoelectric properties of an individual ferroelectric either of a PZT or a BaTiO3 nanotube were electrically characterized by measur...

Here, we reported a strategy of using an eggshell membrane to produce hierarchically porous carbon as low-cost substrate for synthesizing nano-nickel oxide catalyst (C@NiO), which can effective...

A variety of geomaterials, such as cementitious or clay-based materials, has on the nano-scale a layered microstructure that can contain fluid in its nano-porous space. The creep of such nano-scale basic units is what causes the macroscopic creep. Here, one nano-pore whose walls consist of two parallel infinite solid layers interacting through Lennard-Jones potential is studied. The authors eva...

The formation of purely metallic meso-porous metal thin films by partial interface coalescence of self-assembled metal nano-particles across aqueous solutions of Pluronics triblock lyotropic liquid crystals is demonstrated for the first time. Small angle X-ray scattering was used to study the influence of the thin film composition and processing conditions on the ordered structures. The structu...

A wide array of technological applications requires localized high-rate delivery of dissolved compounds (in particular, biological ones), which can be achieved by forcing the solutions or suspensions of such compounds through nano or microtubes and their bundled assemblies. Using a water-soluble compound, the fluorescent dye Rhodamine 610 chloride, frequently used as a model drug release compou...

Carbon coated porous hollow Na2FePO4F (C/Na2FePO4F) spheres with 500 nm diameter and 80 nm wall thickness are synthesized by a one-step template-free ultrasonic spray pyrolysis process using sucrose as the carbon source. Nano-sized porous hollow C/Na2FePO4F spheres allow electrolyte to penetrate into the hollow structure, and thus the electrochemical reaction can take place on both the outside ...

A novel vertical nano-porous structure is reported as a starting point for the fabrication of a fully-surround gate field effect transistor (FET) based on well-ordered nanostructures array. The proposed porous stacking is perfectly suited both for the collective organization of nanostructures like nanowires (NWs) or nanotubes (NTs), as high density (up to 10.cm) arrays with calibrated diameters...