Thermal functional circuits are an interesting group of the MEMS elements with high a potential. A practical realisation is called Quadratic Transfer Characteristics (QTC) element of which driving principle is the Seebeck effect. Such devices can be applied e.g. as RMS meters. In this paper we are dealing with the analyses of a QTC element from different perspectives. A family of compact models...

The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved in the manufacturing of MEMS devices. Probabilistic methods guide the design of these devices to achieve a robust an...