We report a differential splitter consisting of an asymmetric double-step multimode rib waveguide and a Y-branch splitter for in-plane photonic transduction of photonic microcantilever deflection. Arrays of photonic microcantilevers are integrated with differential splitters and an optical waveguide network to demonstrate uniformity and sensitivity of transduction. Measurement results from mult...

Hydromagnetic flow and mass transfer of a viscous incompressible fluid over a microcantilever sensor surface are studied in the presence of slip flow. In addition, chemical reaction at the sensor surface is taken into account. The governing equations for the flow are reduced to a local nonsimilarity form. Resulting equations are solved numerically for various values of flow parameters. Effects ...

piezoelectric microcantilevers (mcs) are a new generation of microbeams used in atomic force microscopes (afms). due to their miniaturization of afms as well as their increased imaging precision and speed, these mcs are more popular than their classical counterparts. given the widespread application of these beams in nanoparticle topography, analysis of their vibrating motion has attracted much...

The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both, the spr...