Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of a more effec...

The interest in micro manufacturing processes is increasing because of the need for components characterized by small dimensions and micro features. As a result, researchers are studying the limitations and advantages of these processes. This paper deals with tool run-out measurement in micro milling. Among the effects of the scale reduction from macro to micro, tool run-out plays an important ...

Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be quantified only after the fabrication of the ...

Measuring the quality of metadata is only possible by assessing the quality of the underlying schema and the metadata instance. We propose some factors that are measurable automatically for metadata according to the CMD framework, taking into account the variability of schemas that can be defined in this framework. The factors include among others the number of elements, the (re-)use of reusabl...

Modern communication services are more and more focused towards real time mobile multimedia applications like mobile video and Voice over IP. To assure sufficient Quality of Service control, appropriate measurements are needed. One of the most difficult tasks is to measure the exact value of one way delay, because very precise time synchronization between host and peer is needed. Most multimedi...

Under the tide of information economy, IT (information technology) capability greatly influences the ability of organizations to adapt to changes, and thereby to improve and preserve organizational task performance in the dynamic and complex business environment. This paper try to analyze the structure of IT capability from dynamic and routinebased perspective. According to the dynamic capabili...

The paper gives an analytical approximation to the viscous damping coefficient due to the motion of a gas between a pair of closely spaced fluctuating plates in which one of the plates contains a regular system of circular holes. These types of structures are important parts of many microelectromechanical devices realized in MEMS technology as microphones, microaccelerometers, resonators, etc.T...

This report deals with the field of micro-electromechanical systems, or MEMS. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and/or systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with microand even nan...