Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for lar...

As a result of the unpredictable nature extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for MEMS switch (MEMS-S3). In particular, this must remain stable without any energy input after state transition (i.e., it be bistable). paper, bistable (MEMS-bS3) is design...

This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which operates at microwave frequencies. The switches are first characterized using a full wave analysis based on finite element method aiming to extract the S-parameters of the switches for different geometrical dimensions. From the S-parameter data base, a scalable lumped circuit model is extracted to...

Improving the power handling capability of direct contact RF MEMS switches requires a knowledge of conditions at the contact. This paper models the temperature rise in a direct contact RF MEMS switch, including the effects of electrical and thermal contact resistance. The maximum temperature in the beam is found to depend strongly on the power dissipation at the contact, with almost no contribu...

The paper discusses the design aspects of capacitive RF MEMS Symmetric Toggle Switch (STS) with particular emphasis on device compactness, reliability, and improvement in isolation & insertion loss by incorporating hafnium dioxide (HfO2) as a dielectric material. The major impact of the change from SiO2 to HfO2 having dielectric constant of 20, is the reduction in overall dimensions of the swit...

We have developed low-loss MEMS switches for 70-120 GHz applications. The MEMS switches are integrated on a high-resistivity silicon substrate, and are built in a coplanar-waveguide configuration. The MEMS switches are fabricated using a thin gold bridge, suspended 1.5-2.5 um above the center conductor of the cpw line. The MEMS bridge is 250 um long with a width of 2540 um, depending in the hei...

This paper describes a MEMS RF switch designed and developed specifically for space communication systems, with a novel geometry and operating mode that overcome the drawbacks of previous devices. To avoid the need for high voltage control, the switch uses electro-thermal rather than electrostatic operation; although this requires higher power consumption during switching, a latching configurat...

MicroElectroMechanical Systems for Radio Frequency applications (i.e. RF-MEMS) show very good performance and characteristics. However, their employment within large-scale commercial applications is still limited by issues related to the reliability of such components. In this work we present the Finite Element Method (FEM) modelling and preliminary experimental results concerning an active res...

For more than two decades, intensive worldwide MEMS research and development have led to widespread applications of MEMS-based devices in consumer, industrial, and military products. Harnessing of MEMS technology enabled the birth of pressure sensors, accelerometers, gyroscopes, print heads, optical switches for rapid communications and, recently, the bio-chips for life science applications. Su...

MEMS tunable vertical cavity surface emitting laser (MEMS-VCSEL) development, over the past two decades, has primarily focused on communications and spectroscopic applications. Because of the narrow line-width, single-mode operation, monolithic fabrication, and high-speed capability of these devices, MEMS-VCSELs also present an attractive optical source for emerging swept source optical coheren...