1.0 INTRODUCTION Solid-state RF devices are currently utilized in a wide array of application areas, including satellite communications systems, wireless communications systems, automotive radars, and defense applications. Currently, PIN diode or Field Effect Transistor (FET)-based switches are utilized for their high switching speeds, high power handling, low drive voltage, low cost, and techn...

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...

A wide variety of microphone arrays have been developed, and the authors have also proposed a type of equally-spaced small-scale microphone array. In this approach, a paired-microphone is selected at each frequency to design a subtractive beamformer that can estimate a noise spectrum. This paper introduces a nonequally-spaced microphone arrangement, which might give more spatial information tha...

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS[1] variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of ...

The signal-to-noise ratio advantage of a directional microphone is achieved by reducing the sensitivity of the microphone to sounds from the sides and back. A fully adaptive directional microphone (one that automatically switches between an omnidirectional mode and various directional polar patterns) may allow the achievement of signal-to-noise (SNR) improvement with minimal loss on audibility ...

Microphone sensor systems provide information that may be used for a variety of applications. Such systems generate large amounts of data. One concern is with microphone failure and unusual values that may be generated as part of the information collection process. This paper describes methods and a MATLAB graphical interface that provides rapid evaluation of microphone performance and identifi...

Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanic...

Introduction: The hearing impairment is affecting more than 360 million people all over the world suffer [1]. In India alone, 63 million people suffer from significant auditory loss [2]. Considerable interest in middle ear implants has emerged over the years to facilitate patients who do not receive significant benefits with conventional hearing aids. Also, the social stigma of wearing external...

Fixed broadband beamformers using small-sized microphone arrays are known to be highly sensitive to errors in the microphone array characteristics. This paper describes a procedure for designing broadband beamformers with an arbitrary spatial directivity pattern, which are robust against errors in the microphone positions. The presented design procedure optimises the mean performance of the bro...