Simulation of electron beam lithography and optical lithography has been combined to investigate the influence of a distorted photomask feature on final photoresist image. Unlike the previous optical lithography simulation which was based on ideal mask design, the combined simulation has shown that mask distortion due to electron proximity effect play an important role in worsening the optical ...

Plasmonic lithography may become a mainstream nanofabrication technique in the future. Experimental results show that feature size with 22 nm resolution can be achieved by plasmonic lithography. In the experiment, a plasmonic lens (PL) is used to focus the laser energy with resolution much higher than the diffraction limit and features are created in the thermally sensitive phase-change materia...

A voice coil motor is a type of permanent magnet linear motor, which based on the Ampere force theorem. It has following advantages: simple structure, small size, no cogging force, and fast response time. In this study, was designed to provide x-directional thrust in magnetically levitated cable table lithography machine. The study Halbach array, adopted single-sided, coreless, flat-type struct...

Model predictive control (MPC) is a very popular controller design method in the process industry. One of the main advantages of MPC is that it can handle constraints on the inputs and outputs. Usually MPC uses linear discrete-time models. Recently we have extended this framework to max-plus-linear discrete event systems. In this paper we further explore this topic. More specifically, we focus ...

Underwater or wet adhesion is highly desirable for numerous applications but counteracted by the liquids in contact which weaken intermolecular attraction. The problem exacerbated conjunction with surface roughness when partially remain grooves dimples of substrate. In present study, a cupped microstructure cavity inspired suction organs aquatic animals proposed. microstructures (cup radius 100...