A unique T-beam microresonator designed to operate on the principle of nonlinear modal interactions due to 1 : 2 internal resonance is introduced. Specifically, the T-structure is designed to have two flexural modes with natural frequencies in a 1 : 2 ratio, and the higher frequency mode autoparametrically excites the lower frequency mode through inertial quadratic nonlinearities. A Lagrangian ...

This paper reports on the state-of-the-art of technologies for the design and fabrication of MEMS micro-mirrors. We discuss the major design issues, considerations, calculations and restrictions of micro mirrors. The materials employed for the reflective surfaces are described along with their properties. The materials used for the static and dynamic MEMS micro structures as well as the differe...

We demonstrate a silicon-based high-frequency nanomechanical device capable of switching controllably between two states at room temperature. The device uses a nanomechanical resonator with two distinct states in the hysteretic nonlinear regime. In contrast to prior work, we demonstrate room-temperature electrostatic actuation and sensing of the switching device with 100% fidelity by phase modu...

We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirro...

This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software wa...

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was ...

This paper analyses scale effects for actuator types which are strong candidates for micro-actuation: shape memory alloys (SMAS), electrostatic, electromagnetic and piezoelectric actuators. SMA actuators are studied in detail and compared to the other actuator types on a basis of force, response time, and power densi~. Much of the analysis is based on thermal aspects and scaling effects on both...

A novel MEMS device architecture: the SOI SGMOSFET, which combines a solid-state MOS transistor and a suspended metal membrane in a unique metal-over-gate architecture, is proposed. A unified physical analytical model (weak, moderate and strong inversions) is developed and used to investigate main electrostatic characteristics in order to provide first-order design criteria for low-voltage oper...

This paper presents the concept of a planar positioning stage based on a kinematically redundant parallel linkage. Basic kinematics and workspace analysis of base redundant manipulator is initially explained and the procedure of static analysis to predict the actuated joint torques is described. As there are six actuators in the linkage, the redundancy can be overcome by proper selection of the...

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the m...