An analytic model of the material removal rate is proposed for chemical mechanical planarization ~CMP!. The effects of the applied pressure and the polishing velocity between the wafer surface and the pad surface are derived considering the chemical reaction as well as the mechanical bear-and-shear process. The mechanism of microscopic material removal is presented. The material removal rate is...

We present a high efficiency wireless MEMS electrochemical bellows actuator capable of rapid and repeatable delivery of boluses for fluid metering and drug delivery applications. Nafion®-coated Pt electrodes were combined with Parylene bellows filled with DI water to form the electrolysis-based actuator. The performance of actuators with several bellows configurations was compared for a range o...

in this paper, the electrochemical behaviour of passive films formed on aisi 321 stainless steel (aisi 321)immersed in 0.1 m naoh + 0.1 m koh solution was evaluated by different electrochemical techniques. forthis purpose, passive films were formed at open circuit potential for 1 to 12 hours and then electrochemicalmeasurements were done. the polarization curves suggested that aisi 321 showed e...

The characteristics of the vacuum used in a low atmospheric pressure stunning system to stun (render unconscious) poultry prior to slaughter are described. A vacuum chamber is pumped by a wet screw compressor. The vacuum pressure is reduced from ambient atmospheric pressure to an absolute vacuum pressure of ∼250 Torr (∼33 kPa) in ∼67 sec with the vacuum gate valve fully open. At ∼250 Torr, the ...

We study theoretically magnetohydrodynamic (MHD) motion of a binary electrolyte in a concentric annulus subjected to a uniform, axial magnetic field. The annulus’ cylindrical surfaces serve as electrodes. When a potential difference is imposed across the cylindrical electrodes, radial electric current flows in the solution and interacts with the axial magnetic field to induce a Lorentz body for...

Much emphasis has been placed on the measurement of physical parameters at the body support interface in order to detect and moderate conditions which could result in pressure damage to soft tissues. Major difficulties are encountered both in the design of instrumentation and interpretation of the data collected. Metabolic processes in sweat glands that control sweat secretion have been shown t...

1. The noradrenaline content of individual brain nuclei was measured by using high-pressure liquid chromatography coupled with electrochemical detection. 2. This study was performed on spontaneously hypertensive rats during the development of hypertension (4 and 12 weeks) and also on deoxycorticosterone-salt hypertensive rats after 1 and 4 weeks of treatment. 3. In young spontaneously hypertens...

Van derWaals layered transition metal dichalcogenides can exist in many di erent atomic and electronic phases. Such diverse polymorphisms not only provide a route for investigating novel topological states, such as quantum spin Hall insulators, superconductors and Weyl semimetals, but may also have applications in fields ranging from electronic and optical/quantum devices to electrochemical cat...

Cellular Physiology 1. Define the distribution of solutes between the intracellular and extracellular compartments. 2. Define passive, active and secondary active transport across the cell membrane. 3. Define the equation and the variables that determine the flux of an uncharged solute by simple diffusion, i.e. Fick’s law of diffusion. 4. Define the role of membrane voltage, concentration gradi...