The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desire...

MEMS (Micro Electro Mechanical System) gyroscopes have been widely applied to various fields, but MEMS gyroscope random drift has nonlinear and non-stationary characteristics. It has attracted much attention to model and compensate the random drift because it can improve the precision of inertial devices. This paper has proposed to use wavelet filtering to reduce noise in the original data of M...

Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of a more effec...

In this paper, we reviewed some of the microelectromechanical system (MEMS) research efforts for high frequency applications. The efforts can be generally divided into two areas: planar reconfigurable transceivers and phased arrays using MEMS devices. For the planar transceivers, the interest is in demonstration of RF MEMS devices with a focus on integration issues including architectures and f...

Widespread acceptance of micro-electro-mechanical systems (MEMS) depends highly on their reliability, both for large-volume commercialization and for critical applications. The problem of multiple dependent failure processes is of particular interest to MEMS researchers. For MEMS devices subjected to both wear degradation and random shocks that are dependent and competing, we propose a new reli...

A hierarchical MEMS synthesis and optimization architecture has been developed for MEMS design automation. The architecture integrates an object-oriented component library with a MEMS simulation tool and two levels of optimization: global genetic algorithms and local gradient-based refinement. An object-oriented data structure is used to represent hierarchical levels of elements in the design l...

The microelectronic department at LIRMM has developed, in the past few years, various types of MEMS sensors. The particularity of our group is to design MEMS that can be integrated either in a System on Chip (SoC) or in a System in Package (SiP) approaches. Therefore, the purpose of this demonstration is to show the feasibility of a silicon attitude sensor using 2 MEMS magnetometers, 2 MEMS the...

GPS-aided MEMS-based inertial navigation systems is a topic of intense interest. In this paper a MEMS-IMU/GPS integrated system based on the PC104 platform is implemented and the time synchronization solution is discussed. Because of the analogue constant voltage outputs of the MEMS-IMU in the process of calibration, a method of testing the accuracy of time synchronization was developed. Some e...

We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our inpu...

for microelectromechanical systems (MEMS) emerge, research efforts shift toward the design of systems of increasing complexity. Focusing on higher-level design issues is being made possible by the development of hierarchical cell design methodologies, libraries of characterized MEMS elements, mixed-technology simulators, layout synthesis tools, and design rule checking tools. By incorporating a...