An experimental setup for the characterization of electromagnetic induced heat on MEMS devices undertaking high RF power regime (> 5W) is here proposed. The technique is based on infrared (IR) imaging of on-probe DUT, while it is in working conditions. The measured temperature distributions, for different working state of a RF-MEMS switch, are given. The results show that for a first considered...

RF-MEMS design is made difficult due to the lack of tools capable of simulating both MEMS devices and their surrounding circuits. Often MEMS components can have structures more than 100 times smaller than the surrounding circuit. This paper presents FDTD based techniques that can be used to simulate large structures containing finely detailed components. Particularly, a split-cell modeling tech...

This paper reports on area-efficient, ultrawideband, MEMS-reconfigurable directional couplers, whose coupling is tuned by mechanically changing the geometry of 3D-micromachined coupled transmission lines, utilizing integrated MEMS electrostatic actuators. Devices have been fabricated in an SOI RF MEMS process. Furthermore, to the best knowledge of the authors, we report for the first time on co...

In this work a new design of a t u n a b l e c a p a c i t o r b a s e d o n microelectromechanical system (MEMS) technology is presented. The design of high Qtunable capacitor has been accomplished through bulk micromachining process with all metal microstructure. A standard IC fabrication process (HP.5μ) is used to carry out the tunable capacitor. The main features of this high-Q MEMS tunable...

Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation. The RF MEMS switches were fabricated via a surface micromachining process using PI2545 Polyimide 1 as the sacrifici...