Most MEMS devices are currently based on silicon because of the available surface machining technology. However, Si has poor mechanical and tribological properties which makes it difficult to produce high performance Si based MEMS devices that could work reliably, particularly in harsh environments; diamond, as a superhard material with high mechanical strength, exceptional chemical inertness, ...

Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.

In this study, we describe the operation of piezoelectric energy converters and electromechanical modeling harvesting (PEH) devices based on microelectromechanical systems (MEMS) for low-power sensors. Consideration is given to a harvester standard MEMS. The parameters are determined optimized using simple MEMS cantilever model. On top Brass substrate, model uses single layer material. We utili...

Power supply for electronics is one of the more recent application areas which has been explored for MEMS devices and techniques. Within this field, the most actively researched application has been MEMS power sources, particularly to replace batteries for portable electronic devices such as wireless sensor nodes. In addition, there are possibilities for MEMS devices in circuit protection, and ...

This paper presents a hybrid prognostics approach for Micro Electro Mechanical Systems (MEMS). This approach relies on two phases: an offline phase for the MEMS and its degradation modeling, and an online phase where the obtained degradation model is used with the available data for prognostics. In the online phase, the particle filter algorithm is used to perform online parameters estimation o...

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parametrized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped parameter analytical equations. The design problem is then formulated into a non-linear constrained optimization problem. Such an approach t...

Failure is one key problem of MEMS S&A (safety and arming) device for its practical application. To make research of failure of MEMS S&A device in action process, a method based on FTA was employed to make analysis on arming process of the set-back arming mechanism of typical MEMS S&A device. Result obtained with theory computation was verified to be right by simulation analysis and which could...

Lumped parameter simulators are increasingly being used for schematic-based MEMS design. However, as layout continues to be the design representation of choice for MEMS manufacturing, layout verification is crucial. Schematic-based simulation tools can be used for this verification through the extraction of the schematic from the layout representation. Furthermore, integrated MEMS needs combine...

Although the universal definition of MEMS product possesses a number of distinctive features, they are miniature systems involving one or more micro-mechanical components or structure. Infrastructure assessment has recently addressed an important field for MEMS application. For example, satisfactory laboratory experiment in the area of concrete monitoring has been developed. Although the experi...