The recent introduction of chromeless-phase lithography (CPL) has provided lithographers with a powerful wavefront engineering tool for patterning at k1 values below 0.3. Reliable image formation at such extreme k1 requires a wellcharacterized CPL photomask. However, the limitations of available optical inspection tools have made the test and measurement of CPL photomasks a difficult task. In t...

We present a new model for a strategic locomotive scheduling problem arising at the Deutsche Bahn AG. The model is based on a multi-commodity min-cost flow formulation that is also used for public bus scheduling problems. However, several new aspects have to be additionally taken into account, such as cyclic departures of the trains, time windows on starting and arrival times, network-load depe...

The goal of this study is to introduce a new type of evidence to the debate on the nature of what is known in the literature as quantifier spreading (q-spreading), also referred to as the “symmetry error”. Since the work of Inhelder and Piaget (1964), it has been known that until the age of 7–8, children’s responses are frequently different from those of adults when judging the truth-value of s...

Emry, Robert J. Revised Tertiary Stratigraphy and Paleontology of the Western Beaver Divide, Fremont County, Wyoming. Smithsonian Contributions to Paleobiology, number 25, 20 pages, 6 figures, 1975.•In the western Beaver Divide area in west-central Wyoming, a lens of coarse Tertiary volcanic conglomerate and tuff disconfqrmably overlies Uintan rocks of the Wagon Bed Formation. The coarse volcan...

One of the motor reactions commonly involved in the operation of both military and civilian equipment is that of moving a limb (or limbs) as quickly as possible from one position in space to another. Normally, it is desired to terminate the movement at exactly the aimed-for point with a minimum of error and oscillation. The aerial gunner, for example, in tracking a moving target, is often calle...

the single wheel tester is an experimental device used to measure wheel forces when studying the relation of soil and wheel in a soil bin or in the field. in the model under development, a special frame holding the test wheel is connected to a loading carriage by two pairs of vertical rails and four rollers to provide a floating connection. by applying a driving torque to the test wheel shaft, ...

1987 SUMMARY Thirty-jive volunteers responded when they first perceived an increase in apparent size o f a collimated, two-dimensional image of an Orbiter vehicle. The test variables of interest included the presence o f afixed angular reticle within the field of view (FOV); three initial Orbiter distances; three constant Orbiter approach velocities corresponding to 1.6, 0.8, and 0.4% of the in...

This paper presents the design and realization of a three degrees of freedom (DOFs) displacement measurement system composed of Hall sensors, which is built for the XYθz displacement measurement of the short stroke stage of the reticle stage of lithography. The measurement system consists of three pairs of permanent magnets mounted on the same plane on the short stroke stage along the Y, Y, X d...