Real-time, in situ chemical sensing has been applied to achieve reaction metrology and advanced process control in a low pressure tungsten chemical vapor deposition process based on WF6 and SiH4 reactants ~silane reduction process!. Using mass spectrometry as the sensor to detect both product generation (H2) and reactant depletion (SiH4) at wafer temperature of 200–250 °C, these signals provide...

Tunnel monitoring is an important task in civil engineering that aims at determining the stability and safety of a structure by using information about its deformations. In this paper we present the development and the results of a fast method for displacement measurement based on digital images, which allows a deformation analysis along the cross-sections of a tunnel. This technique was create...

In this paper we study the problem of computing the smallest-width annulus for a convex polytope in R d. This generalizes a topic from tolerancing metrology to higher dimensions, of which the planar case has been investigated by Swanson, Lee and Wu. We show this problem to be equivalent to the problem of computing diierent variants of Hausdorr-minimal spheres. We can formulate the latter proble...

We examine a family of intrinsic performance measures in terms of probability distributions that generalize Hellinger distance and Fisher information. They are applied to quantum metrology to assess the uncertainty in the detection of minute changes of physical quantities. We show that different measures lead to contradictory conclusions, including the possibility of arbitrarily small uncertain...

The use of World Web Wide for distance education has received increasing attention over the past decades. The real challenge of adapting this technology for engineering education and training is to facilitate the laboratory experiments via Internet. In the sciences, measurement plays an important role. The accuracy of the measurement, as well as the units, help scientists to better understand p...

Photogrammetric network design is the process of optimising a network configuration in terms of the accuracy of object points. This accuracy is improved by selecting the best set of intersection rays in a bundle adjustment. This paper explains the approach followed to achieve the development of a practical network design using a real robotic system. The aim is to integrate a simulation-based ne...

Various techniques used for road-traffic monitoring rely on sensors which have limited capabilities, are inexible and often, both costly and disruptive to install. The use of video cameras (many of which are already installed to survey road networks), coupled with computer vision techniques offers an attractive alternative to current sensors. Vision based sensors have the potential to measure a...

P.I.Neyezhmakov – PhD, 1 Deputy General Director on scientific work of National Scientific Center “Institute of Metrology”( Kharkiv, Ukraine), Head of COOMET Secretariat (Euro-Asian cooperation of national metrological institutions) S.I.Zub – senior scientist of NSC “Institute of Metrology”, Kharkiv, Ukraine S.S.Zub – PhD, doctoral candidate of Taras Shevchenko National University of Kyiv, Ukraine

Novel metrology has been developed for measuring in-situ film thickness and absorption coefficient simultaneously. Designed specifically for photolithography processes, this metrology, if applied to photoresist films, can measure thickness and photoactive compound concentration in-situ, which are important parameters for photolithography process control and diagnosis.

Metrology applications commonly require non-contact, capacitive sensors for displacement measurements due to their nanometer resolution. In some metrology applications, for example, the measurement of roundness and spindle error motion, the displacements of stationary and rotating cylindrical artifacts are measured. Error from using a conventionally calibrated sensor with a non-flat (e.g., cyli...