In this paper, parameters related to the sensitivity of the interface circuits for capacitive sensors are determined. Both the input referred noise and capacitance of the input transistors are important for capacitive sensitivity. Chopping is an effective technique for signal conditioning circuits because of its capability of reducing circuit noise at low frequencies. The capacitive sensitivity...

This study fabricated a multiple poly-Si nanowires sensor through a top-down method and immobilized glucose oxidase on the multiple nanowires for determining glucose concentration. The proposed sensor is 340 nm in width and uses five physically identical and parallel nanowires. The sensor contained nanowires of various lengths (3, 5, and 10 μm). Experimental results showed that sensor sensitivi...

This paper is about designing a silicon based piezoresistive micro pressure sensor for greater sensitivity. Using Finite Element Analysis (FEA) the role played by important design parameters like the side length and the thickness of the pressure sensing membrane in determining the sensitivity of the sensor are studied in detail for a pressure of 100 kPa. The fracture stress of silicon is adopte...

In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermor...

This paper presents the design and analysis of a liquid refractive index sensor that utilizes a unique physical mechanism of resonant optical tunneling effect (ROTE). The sensor consists of two hemicylindrical prisms, two air gaps, and a microfluidic channel. All parts can be microfabricated using an optical resin NOA81. Theoretical study shows that this ROTE sensor has extremely sharp transmis...

This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity...