Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of a more effec...

This report deals with the field of micro-electromechanical systems, or MEMS. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and/or systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with microand even nan...

In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved.

We survey some recent applications of the Boltzmann equation to the study of MEMS.