A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.

Purpose Considering its vast utility in industries, this paper aims to present a detailed review on fundamentals, classification and progresses pressure sensors, along with wide area of applications, design aspects challenges, provide state-of-the-art gist the researchers similar domain at one place. Design/methodology/approach Swiftly emerging research prospects micro-electro-mechanical system...

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...

-One of the latest manifestations of miniaturization in space applications is the development of standardized nanosatellite. Recent achievements and future trends of Micro-Electro-Mechanical Systems (MEMS) technology have indicated that microtechnology is the critical technologies of future space programs. Enabling technologies for demanding applications will surely make use of MEMS based compo...

In this paper, the authors introduced a new approach to realize a contact-free micro-bearing for MEMS (Micro-Electro-Mechanical-Systems) applications. In the proposed idea, the mechanism of magnetic repulsion by eddy current was employed. Numerical analysis and experimental research was performed. In the proposed structure having a ringed magnetic circuit having a circularly-arranged gap (gappe...

Electro-thermo-elastic stress analysis of piezoelectric polymeric thick-walled cylinder reinforced by boronnitride nanotubes (BNNTs) subjected to electro-thermo-mechanical fields is presented in this article. The electro-thermo-elastic properties of piezoelectric fiber reinforced composite (PEFRC) was studied by a modified XY micromechanical model capable of exhibiting full coupling relati...