A novel scheme of flash evaporation feeding for MOCVD processes of multicomponent oxide films deposition is proposed. The scheme comprises 1) microdozage of organic solution of solid volatile precursors on the glass fiber belt, 2) evaporation of the solvent and 3) flash evaporation of MOC microdoses from the belt. The functioning of the designed feeder is described and the features of proposed ...

Book 15th American Conference on Crystal Growthand Epitaxyand11th Biennial Workshop on OMVPEand3rd International Symposium on Lasers andNonlinear Optical Materials July 20-24, 2003Keystone, Colorado Sponsored by theAmerican Association for Crystal Growth

Film properties of TaN-based metal (TaCN and TaSiN) have been precisely controlled for plasma enhanced ALD (PEALD) and thermal ALD with additives of N2 or NH3. Film resistivity (ρ) strongly depended on the nitrogen concentration of TaN-based metal. These films showed conformal step-coverage for high-aspect (>6) 50nm-wide trenches. Consequently, ALD TaN-based metal is promising for microelectron...

The chemistry and biochemistry of the vitamin B(12) compounds (cobalamins, XCbl) are described, with particular emphasis on their structural aspects and their relationships with properties and function. A brief history of B(12), reveals how much the effort of chemists, biochemists and crystallographers have contributed in the past to understand the basic properties of this very complex vitamin....

The defect structure of zincblende GaN nucleation layers grown by metalorganic vapor-phase epitaxy on 3C-SiC/Si (001) was investigated high-resolution scanning transmission electron microscopy. Perfect dislocations, partial and stacking faults are present in the layers. dislocations identified as 60° mixed-type act misfit to relieve compressive lattice mismatch strain GaN. Stacking mainly bound...