The research product ...............................................................................................................................1
 Deformable mirrors: current state-of-the-art...........................................................................................2
 AO and MEMS DMs: relevance to astronomy and space science......................................................

Three-dimensional (3D) integration of microand nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. 3D ...

An ultra-compact optical true time delay device is demonstrated that can support 112 antenna elements with better than six bits of delay in a volume 16”x5”x4” including the box and electronics. Free-space beams circulate in a White cell, overlapping in space to minimize volume. The 18 mirrors are slow-tool diamond turned on two substrates, one at each end, to streamline alignment. Pointing accu...

Introduction: Multi-throw switches are widely used in microwave circuits for switch matrices and true-time-delay phase shifting applications. Traditionally, the multi-throw switch uses GaAs MESFETs and pin diodes to perform its switching function. It exhibits good performances at low frequencies, but deteriorates in the high frequency range beyond 1 GHz [1]. On the other hand, the monolithic mi...

This paper presents a novel configuration of a MEMS scanning endoscope that is actuated by external optical modulation. Light at a wavelength in the 1550nm range is used to modulate a scanning MEMS mirror, and wavelength of 1310nm, commonly used for optical coherence tomography (OCT), is used for the probe beam. This novel approach provides for the operation of a scanning endoscope without the ...

By offering images with high spatial resolution and unique optical absorption contrast, optical-resolution photoacoustic microscopy (OR-PAM) has gained increasing attention in biomedical research. Recent developments in OR-PAM have improved its imaging speed, but have to sacrifice either the detection sensitivity or field of view or both. We have developed a wide-field fast-scanning OR-PAM by u...

The companynow a wholly owned subsidiary of Cypress Semiconductor Corp.has combined expertise in MEMS process technology, MEMS design and test, optics design and optical network engineering. Currently, Silicon Light Machines’ customers are using GLV technology in optical attenuators and switches, direct-to-plate printers, HDTV monitors, electronic cinema projectors and commercial flight simul...

This work reports electrothermal MEMS parallel plate-rotation (PPR) for a single-imager based stereoscopic endoscope. A thin optical plate was directly connected to an electrothermal MEMS microactuator with bimorph structures of thin silicon and aluminum layers. The fabricated MEMS PPR device precisely rotates an transparent optical plate up to 37° prior to an endoscopic camera and creates the ...